公开(公告)号：US20230046424A1

公开(公告)日：2023-02-16

申请号：US17691471

申请日：2022-03-10

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hyeon Jin KIM ,  Sung Hyup KIM ,  Jeong-Gil KIM ,  Jeong Du KIM ,  Sang Hoon LEE ,  In Jae LEE ,  Jong Gu LEE

IPC: H05G2/00 ,  G03F7/20 ,  H01L21/3065 ,  H01L21/027

Abstract: An extreme ultraviolet light generator includes a collector including a first focus and a second focus, a droplet feeder configured to provide a source droplet toward the first focus of the collector, a laser generator configured to irradiate a laser toward the first focus of the collector, an airflow controller between the first focus and the second focus of the collector, the airflow controller having a ring shape, and the airflow controller including at least one slit, and a first part and a second part hinged to each other, and a control gas feeder configured to provide a control gas towards the at least one slit of the airflow controller.