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公开(公告)号:US20140134712A1
公开(公告)日:2014-05-15
申请号:US14072118
申请日:2013-11-05
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kyoung Won NA , Yoon Dong PARK , Sung Dong SUH , Dong Mo IM
IPC: G01N21/84 , H01L31/18 , G01N33/483
CPC classification number: H01L31/18 , G01N21/7746 , G01N33/483
Abstract: An optical biosensor, and a method of manufacturing the same, includes a first layer, a second layer stacked on the first layer, a first grating coupler within the first layer and the second layer, and a second grating coupler within the first layer. The first grating coupler is configured to couple a light pattern provided to a front side of the optical biosensor. The second grating coupler is configured to output the light pattern coupled by the first grating coupler to a photoelectric conversion element on a rear side of the optical biosensor.
Abstract translation: 光学生物传感器及其制造方法包括:第一层,堆叠在第一层上的第二层,第一层和第二层内的第一光栅耦合器,以及第一层内的第二光栅耦合器。 第一光栅耦合器被配置为耦合提供给光学生物传感器前侧的光图案。 第二光栅耦合器被配置为将由第一光栅耦合器耦合的光图案输出到光学生物传感器的后侧上的光电转换元件。