公开(公告)号：US20180138074A1

公开(公告)日：2018-05-17

申请号：US15786710

申请日：2017-10-18

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： KYUN-JIN LEE ,  SANG-HOON AHN ,  MYUNG-JOON PARK ,  MIN-SAM KIM ,  SANG-HOON LEE

IPC: H01L21/687 ,  C23C16/458

CPC classification number: H01L21/68757 ,  C23C16/4584 ,  C23C16/4585 ,  C23C16/4586 ,  H01L21/67103 ,  H01L21/68735 ,  H01L21/68764 ,  H01L21/68771

Abstract: A pedestal of a CVD apparatus includes a raised central portion, a peripheral portion extending around the central portion, and a carrier ring support disposed along the peripheral portion. A carrier ring of the CVD apparatus includes an annular body disposed over the peripheral portion of the pedestal. The carrier ring is mounted to the pedestal by virtue of the carrier ring support, and in such a way that a lower surface of the annular body is spaced vertically from the peripheral portion of the pedestal and the carrier ring is separable from the pedestal in a vertical direction. A drive mechanism cooperates with carrier ring to lift the carrier ring of the pedestal and mount the carrier ring back onto the pedestal.