公开(公告)号：US20210364420A1

公开(公告)日：2021-11-25

申请号：US17081568

申请日：2020-10-27

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jaehwang JUNG ,  Wookrae KIM ,  Myoungki AHN ,  Changhyeong YOON

IPC: G01N21/21

Abstract: A measurement system is disclosed. A measurement system includes an illumination module, a mirror module, a stage, and a detector. The illumination module includes a light source, an optical fiber, a collimating mirror, a polarization state generator, a beam control mirror, and a relay mirror. The mirror module includes a first beam splitter and a reflective objective mirror. The beam control mirror is movable to relay light received from the polarization state generator to various positions on the relay mirror.