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1.发明申请公开(公告)号：US20200346143A1
公开(公告)日：2020-11-05
申请号：US16567052
申请日：2019-09-11
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Taehoi PARK , Sangjin KIM , Nakhee SEONG , Woojeong SHIN , Taehwan OH , Kwangsub YOON
Abstract: A resist coating apparatus including a resist supplying system; a resist filtering system having a first filter, a second filter, and a pump between the first filter and the second filter; and a resist dispensing system, wherein the first filter includes a plurality of first unit filters connected in parallel.
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