公开(公告)号：US10538843B2

公开(公告)日：2020-01-21

申请号：US15385006

申请日：2016-12-20

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hyun-Sik Sim ,  Jung-Suk Oh ,  Jae-Seok Kim ,  Ho-Gon Kim ,  Jun-Won Lee ,  Hyuk-Yul Choi ,  Hyung-Ho Kim ,  Sang-Jin Choi ,  Heok-Jae Lee ,  Dong-Ok Shin ,  Jang-Hyoun Youm ,  Ichiro Nishikawa ,  Masanori Terasaka ,  Masashi Hamada ,  Tae-Hoon Lee

IPC: C23C16/455 ,  C23C16/44

Abstract: A vaporizer includes a main body including a first body and a second body. The first body has an upper portion narrowing in a direction of a height of the first body and the second body has a cavity in which the first body is positioned. A mixing chamber is between the first and second bodies. The second body includes a carrier gas injection path connected to a carrier gas inlet formed in an upper portion of the mixing chamber. The carrier gas injection path carries a carrier gas. A source material injection path is connected to a source material inlet formed in the mixing chamber. The source material injection path carries a liquid source material. A discharge is connected to an outlet formed in a lower portion of the mixing chamber. A mixed fluid including the carrier gas and the liquid source material is discharged through the discharge path.