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公开(公告)号:US20140069456A1
公开(公告)日:2014-03-13
申请号:US13874595
申请日:2013-05-01
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jun-ho LEE , Seung-yeon LEE , Kang-hee LEE , Seon-ah JIN
IPC: B08B7/02
CPC classification number: B08B7/028 , B08B7/00 , H01L21/02046
Abstract: A method for removing organic materials includes providing a target object having the organic materials adsorbed thereon, and an adsorbent, into a space including a non-liquid medium therein; and separating the organic materials from the target object by applying ultrasound waves to the target object having the organic materials adsorbed thereon and the adsorbent in the space, and disposing the organic materials to the adsorbent.
Abstract translation: 一种除去有机材料的方法包括将吸附有有机材料的目标物体和吸附剂提供到其中包含非液体介质的空间中; 并通过对吸附有有机材料的目标物体和空间中的吸附剂施加超声波,将有机材料与目标物体分离,并将有机材料设置在吸附剂上。