公开(公告)号：US10526706B2

公开(公告)日：2020-01-07

申请号：US15485433

申请日：2017-04-12

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Suk Jin Chung ,  Jong Cheol Lee ,  Jae chul Shin ,  Min Hwa Jung ,  Jin Pil Heo

IPC: C23C16/458 ,  C23C16/455 ,  C23C16/44 ,  H01L21/687 ,  H01L21/02 ,  H01J37/32

Abstract: A gas supply unit includes a base plate, a plurality of gas supply regions protruding from the base plate and arranged on the base plate in a circumferential direction, and a plurality of sidewall trenches alternating with the gas supply regions on the base plate. A distance between opposing surfaces of the base plate increases in a radial direction from a center of the base plate in each of the plurality of sidewall trenches, so each of the plurality of sidewall trenches has a depth that decreases in the radial direction from the center of the base plate.