公开(公告)号：US20140338600A1

公开(公告)日：2014-11-20

申请号：US14259433

申请日：2014-04-23

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jong-Cheol LEE ,  Beom-Seok KIM ,  Suk-JIn CHUNG ,  Geun-Kyu CHOI

IPC: C23C16/44

CPC classification number: C23C16/4412

Abstract: An exhausting apparatus includes an exhaust pump configured to extract unreacted precursor in a process chamber and vent the unreacted precursor out of the exhaust pump, and a first material supplier configured to supply a first material into the exhaust pump. The first material is adsorbable on an interior surface of the exhaust pump to prevent the unreacted precursor from being adsorbed on the interior surface of the exhaust pump.

Abstract translation: 排气装置包括排气泵，所述排气泵构造成在处理室中提取未反应的前体并将未反应的前体排出所述排气泵;以及第一材料供应器，其被配置为将第一材料供应到所述排气泵中。 第一材料可吸附在排气泵的内表面上，以防止未反应的前体被吸附在排气泵的内表面上。