公开(公告)号：US20180286739A1

公开(公告)日：2018-10-04

申请号：US15798686

申请日：2017-10-31

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hyun-Jin MIN ,  Jung-Hoon BAEK ,  Won-Guk SEO ,  Sung-Bong KIM ,  Suk-Won LEE

IPC: H01L21/683

CPC classification number: H01L21/6838 ,  B25J15/0061 ,  B25J15/0226 ,  B25J15/0616

Abstract: A pickup apparatus includes a plurality of pickers sliding along a first direction and a space adjuster including a plurality of space adjusting plates. Each picker includes a protruding portion combined with a picker body, and each of the space adjusting plates is between a respective pair of adjacent pickers. The protruding portion of each picker contacts sidewalls of adjacent space adjusting plates. At least one of the space adjusting plates moves along a second direction crossing the first direction. A width in the first direction of each space adjusting plate varies along the second direction.