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公开(公告)号:US20220352375A1
公开(公告)日:2022-11-03
申请号:US17860820
申请日:2022-07-08
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Mirco CANTORO , Yeoncheol HEO
IPC: H01L29/78 , H01L29/06 , H01L27/088 , H01L29/417 , H01L29/10 , H01L29/66 , H01L21/8238 , H01L21/8234
Abstract: The present disclosure relates to a field-effect transistor and a method of fabricating the same. A field-effect transistor includes a semiconductor substrate including a first semiconductor material having a first lattice constant, and a fin structure on the semiconductor substrate. The fin structure includes a second semiconductor material having a second lattice constant that is different from the first lattice constant. The fin structure further includes a lower portion that is elongated in a first direction, a plurality of upper portions protruding from the lower portion and elongated in a second direction that is different from the first direction, and a gate structure crossing the plurality of upper portions.
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公开(公告)号:US20200343382A1
公开(公告)日:2020-10-29
申请号:US16923389
申请日:2020-07-08
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Mirco CANTORO , Yeoncheol HEO
IPC: H01L29/78 , H01L29/06 , H01L27/088 , H01L29/417 , H01L29/10 , H01L29/66 , H01L21/8238 , H01L21/8234
Abstract: The present disclosure relates to a field-effect transistor and a method of fabricating the same. A field-effect transistor includes a semiconductor substrate including a first semiconductor material having a first lattice constant, and a fin structure on the semiconductor substrate. The fin structure includes a second semiconductor material having a second lattice constant that is different from the first lattice constant. The fin structure further includes a lower portion that is elongated in a first direction, a plurality of upper portions protruding from the lower portion and elongated in a second direction that is different from the first direction, and a gate structure crossing the plurality of upper portions.
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