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公开(公告)号:US20230264350A1
公开(公告)日:2023-08-24
申请号:US17957967
申请日:2022-09-30
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Daejung KIM , Minyoung KANG , Sungsoo KIM , Sohee KIM , Yongsoo YOO
CPC classification number: B25J9/163 , B25J9/1697 , B25J19/021 , B25J11/0095 , B25J9/1684
Abstract: A method includes performing a substrate processing process by carrying a substrate into a chamber, and disposing the substrate in a loading region of the chamber, capturing an image of a lower surface of the substrate to acquire a first image, identifying particle patterns formed on the lower surface of the substrate in the substrate processing process, and an edge of the substrate, from the first image, calculating a first alignment error value of a deviation between an approximate position value for the center of the loading region calculated from the particle patterns and an approximate position value for a center of the substrate calculated from the edge of the substrate, and determining a point in time for teaching a transfer robot that deposits the substrate into the chamber, based on the first alignment error value.
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公开(公告)号:US20250091203A1
公开(公告)日:2025-03-20
申请号:US18961702
申请日:2024-11-27
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Daejung KIM , Minyoung KANG , Sungsoo KIM , Sohee KIM , Yongsoo YOO
Abstract: A method includes performing a substrate processing process by carrying a substrate into a chamber, and disposing the substrate in a loading region of the chamber, capturing an image of a lower surface of the substrate to acquire a first image, identifying particle patterns formed on the lower surface of the substrate in the substrate processing process, and an edge of the substrate, from the first image, calculating a first alignment error value of a deviation between an approximate position value for the center of the loading region calculated from the particle patterns and an approximate position value for a center of the substrate calculated from the edge of the substrate, and determining a point in time for teaching a transfer robot that deposits the substrate into the chamber, based on the first alignment error value.
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