公开(公告)号：US20040165151A1

公开(公告)日：2004-08-26

申请号：US10617394

申请日：2003-07-11

申请人： SEIKO EPSON CORPORATION

发明人： Masashi Kitabayashi ,  Naoyuki Miyajima ,  Masaki Maruyama

IPC分类号： G03B021/26

CPC分类号： H04N9/315 ,  G02B27/285 ,  G03B21/142 ,  G03B21/2073

摘要： A first positioning step S1 positions and fixes a light focusing element and a polarization converting element. A beam introducing step S5 introduces beams to a beam splitting element, the light focusing element and the polarization converting element. An optical image forming step S6 detects an optical image through the above elements. An illumination-area comparing step S9 performs an image processing on the detected optical image to compare an illumination area formed by the optical image with a designed illumination area. A beam-splitting-element position-adjusting step S11 adjusts the position of the beam splitting element. An optimal-state determining step S10 determines the optimal state of the illumination area of the optical image with respect to the designed illumination area on the basis of the comparison result. The position of the beam splitting element is adjusted in a beam splitting element position-adjusting step S11 when the beam splitting element is not located in the optimal position. A second positioning step S12 positions and fixes the beam splitting element to the light focusing element and the polarization converting element.

摘要翻译： 第一定位步骤S1定位和固定光聚焦元件和偏振转换元件。 光束引入步骤S5将光束引入分束元件，光聚焦元件和偏振转换元件。 光学图像形成步骤S6通过上述元件检测光学图像。 照明区域比较步骤S9对所检测的光学图像执行图像处理，以将由光学图像形成的照明区域与设计的照明区域进行比较。 分束元件位置调整步骤S11调整分束元件的位置。 最优状态判定步骤S10基于比较结果来确定光学图像的相对于设计的照明区域的照明区域的最佳状态。 当分束元件不位于最佳位置时，在分束元件位置调整步骤S11中调整分束元件的位置。 第二定位步骤S12将分束元件定位并固定到光聚焦元件和偏振转换元件。