公开(公告)号：US20140184706A1

公开(公告)日：2014-07-03

申请号：US14141086

申请日：2013-12-26

Applicant: SEIKO EPSON CORPORATION

Inventor： Satoshi NAGATOYA ,  Nobuhiro NAITO

IPC: B41J2/14

CPC classification number: B41J2/14233 ,  B41J2/1606 ,  B41J2/161 ,  B41J2/1642 ,  B41J2/1646

Abstract: According to a liquid ejecting head, it is possible to suppress erosion of a vibrating plate by liquid, suppress generation of variation in a vibrating property, and realize a thin head. The liquid ejecting head includes a flow path formation substrate on which a pressure generation chamber communicating with nozzle openings for discharging liquid is provided, an elastic film which is provided on one surface side of the flow path formation substrate and seals the pressure generation chamber, and a piezoelectric actuator which is a pressure generation unit which is provided on the elastic film to deform the elastic film. A tantalum oxide film which is formed by atomic layer deposition is provided at least on an inner wall of the pressure generation chamber.

Abstract translation: 根据液体喷射头，可以抑制振动板被液体的侵蚀，抑制振动特性的变化的产生，实现薄的头部。 液体喷射头包括流路形成基板，在该流路形成基板上设置有与用于排出液体的喷嘴开口连通的压力产生室，弹性膜设置在流路形成基板的一个表面侧并密封压力产生室， 压电致动器，其是设置在弹性膜上以使弹性膜变形的压力产生单元。 至少在压力产生室的内壁上设置由原子层沉积形成的氧化钽膜。

公开(公告)号：US20210094296A1

公开(公告)日：2021-04-01

申请号：US17031617

申请日：2020-09-24

Applicant: SEIKO EPSON CORPORATION

Inventor： Shotaro TAMAI ,  Nobuhiro NAITO ,  Yuma FUKUZAWA ,  Akinori TANIUCHI ,  Shohei MIZUTA

IPC: B41J2/14

Abstract: The communication plate has a first layer that defines a wall surface of the communication flow channel, a second layer stacked on a side of the first layer opposite to the wall surface, and a third layer stacked on a side of the second layer opposite to the first layer, and the thermal expansion coefficient of the second layer is smaller than the thermal expansion coefficient of the first layer and is smaller than the thermal expansion coefficient of the third layer.