公开(公告)号：US20140165702A1

公开(公告)日：2014-06-19

申请号：US14099262

申请日：2013-12-06

Applicant: SEIKO INSTRUMENTS INC.

Inventor： Sachiko TANABE ,  Masayuki SUDA ,  Hiroshi MURAMATSU

IPC: G01N29/036

CPC classification number: G01N29/022 ,  G01N2291/02818

Abstract: A QCM (Quartz Crystal Microbalance) sensor includes a quartz crystal vibrator for measurement having a first electrode which contacts a measurement sample to be detected and a first quartz substrate in which is formed the first electrode, and a quartz crystal vibrator for reference having a second electrode which contacts a reference sample serving as a reference when detecting the physical quantity of the measurement sample and a second quartz substrate in which is formed the second electrode. A housing accommodates the quartz crystal vibrators and confines the reference sample in a state of contacting the second electrode. The QCM sensor is capable of detecting a physical quantity of the measurement sample accurately at the time of measuring the physical quantity of the sample in an atmosphere of the sample.

Abstract translation: QCM（石英晶体微量天平）传感器包括用于测量的石英晶体振子，其具有接触待检测的测量样本的第一电极和形成有第一电极的第一石英衬底，以及用于参考的石英晶体振子，具有第二 电极，当检测到测量样品的物理量时接触作为参考的参考样品和形成第二电极的第二石英衬底。 壳体容纳石英晶体振子并将参考样品限制在接触第二电极的状态。 QCM传感器能够在测量样品的气氛中的样品的物理量时精确地检测测量样品的物理量。