公开(公告)号：US20220135332A1

公开(公告)日：2022-05-05

申请号：US17474285

申请日：2021-09-14

Applicant: SEMES Co., Ltd.

Inventor： Jun Sang Ahn ,  Sun Oh Kim ,  Chan Young Noh

IPC: B65G1/137

Abstract: Provided are a container transporting apparatus for storing items such as FOUPs and reticle pods by utilizing the dead zone space located in an upper portion of the semiconductor manufacturing facility built in the FAB, and a container storage system having the same. The container storage system may include a first storage unit installed on a side of a movement path of a transporting device for transporting a container accommodating a substrate and for storing the container; a second storage unit installed on a side of the first storage unit and for storing the container; and a transporting unit moving between the first storage unit and the second storage unit and for transporting the container stored in the first storage unit to the second storage unit.

公开(公告)号：US12240701B2

公开(公告)日：2025-03-04

申请号：US17474285

申请日：2021-09-14

Applicant: SEMES Co., Ltd.

Inventor： Jun Sang Ahn ,  Sun Oh Kim ,  Chan Young Noh

IPC: B65G1/137 ,  H01L21/673 ,  H01L21/677

Abstract: Provided are a container transporting apparatus for storing items such as FOUPs and reticle pods by utilizing the dead zone space located in an upper portion of the semiconductor manufacturing facility built in the FAB, and a container storage system having the same. The container storage system may include a first storage unit installed on a side of a movement path of a transporting device for transporting a container accommodating a substrate and for storing the container; a second storage unit installed on a side of the first storage unit and for storing the container; and a transporting unit moving between the first storage unit and the second storage unit and for transporting the container stored in the first storage unit to the second storage unit.