公开(公告)号：US20200065008A1

公开(公告)日：2020-02-27

申请号：US16535125

申请日：2019-08-08

Applicant: SEMES Co. Ltd.

Inventor： Sangman YIM

IPC: G06F3/06

Abstract: The present invention relates to a method of monitoring a memory usage and a substrate processing apparatus. The method of monitoring a memory usage of the present invention comprises: a memory usage collecting step of collecting a memory usage according to a predetermined collection period; a memory leak determining step of determining a memory leak based on the collected memory usage; and an alarm processing step of generating an equipment alarm based on the determining result of the memory leak, wherein the memory leak determining step includes a first memory leak determining step of determining the memory leak by comparing the memory usage with a predetermined threshold value and a second memory leak memory step of determining the memory leak based on a change trend of the memory usage when the memory usage does not exceed the predetermined threshold value.