CAPACITORLESS 3D STACKED DRAM DEVICE AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20240397699A1

    公开(公告)日:2024-11-28

    申请号:US18570810

    申请日:2023-10-17

    Abstract: The present disclosure discloses a capacitorless three-dimensional stacked DRAM device including a plurality of memory cell structures spaced apart from each other in horizontal and vertical directions, each of the plurality of memory cell structures including a horizontal read transistor structure and a horizontal write transistor structure, a plurality of write bit lines connected to the plurality of write transistor structures of the plurality of memory cell structures and extending in the horizontal direction, a plurality of read bit lines connected to the plurality of read transistor structures of the plurality of memory cell structures and extending in the horizontal direction, a plurality of write word lines connected to the plurality of write transistor structures and extending in the vertical direction, and a plurality of read word lines connected to the plurality of read transistor structures and extending in the vertical direction.

    CAPACITORLESS 3D DRAM DEVICE AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20250098140A1

    公开(公告)日:2025-03-20

    申请号:US18577057

    申请日:2023-10-23

    Abstract: The present disclosure discloses a capacitorless 3D DRAM device including a write bit line extending in a vertical direction, a write word line extending in a horizontal direction, a write transistor connected to the write bit line and the write word line, and defined to include a first channel material layer, a first gate insulating layer, and a portion of the write word line, a read bit line extending in the vertical direction, a read word line extending in the horizontal direction, and a read transistor connected to the read bit line and the read word line.

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