公开(公告)号：US20120260724A1

公开(公告)日：2012-10-18

申请号：US13087973

申请日：2011-04-15

Applicant: SEUNG YONG LEE

Inventor： SEUNG YONG LEE

IPC: G01M15/10

CPC classification number: G01M15/106

Abstract: The present invention relates to an exhaust pressure measuring device, and more particularly, to an exhaust pressure measuring device that allows measurement of a change of pressure in an exhaust line in order to prevent problems caused by clogging of an exhaust line at a outletside of a dry pump and at an inletside of a scrubber, and an exhaust line at a outletside of the scrubber in a semiconductor or LCD apparatus in advance.The exhaust pressure measuring device according to the present invention includes a connection pipe connected to a middle of an exhaust line for carrying byproduct gas, the connection pipe having an opening formed in a middle of a body thereof; a chamber provided at an outer side of the connection pipe and communicating with an inside of the connection pipe through the opening, the chamber having a nitrogen supply line connected thereto, the nitrogen supply line allowing nitrogen gas to be supplied from the outside; and a pressure sensor installed to the chamber to measure pressure in the chamber, whereby a change of exhaust pressure in the exhaust line is measured from the measured pressure in the chamber.

Abstract translation: 排气压力测量装置技术领域本发明涉及一种排气压力测量装置，更具体地，涉及一种排气压力测量装置，其能够测量排气管线中的压力变化，以防止在排气管出口处的排气管堵塞所引起的问题 预先在半导体或液晶显示装置中的洗涤器出口侧的排气管路和干燥泵的入口处。 根据本发明的排气压力测量装置包括连接到排气管的中间的连接管，用于承载副产物气体，所述连接管具有形成在其本体中部的开口; 设置在连接管的外侧的室，通过开口与连接管的内部连通，所述室具有与其连接的氮供给管，所述氮供给管允许从外部供给氮气; 以及压力传感器，其被安装到所述室中以测量所述室中的压力，由此根据所述室中的测量压力来测量排气管线中的排气压力的变化。