AUTOMATIC FOCUSING SYSTEM
    1.
    发明公开

    公开(公告)号:US20240176101A1

    公开(公告)日:2024-05-30

    申请号:US18431822

    申请日:2024-02-02

    Inventor: Simin FAN

    CPC classification number: G02B7/34

    Abstract: Disclosed is an automatic focusing system. The illumination system is configured to generate two illumination beams directed toward the characteristic signal generation system. The characteristic signal generation system includes two transparent gratings with regular periods. The two illumination beams respectively pass through the two transparent gratings to form two transparent grating image beams which are directed to the TIR prism and the objective lens at different angles. The two transparent grating image beam after passing through the objective lens interfere on an object surface to form a moiré fringe image which is captured by the imaging system. The processor is configured to determine a defocus direction and a defocus amount according to a position of the moiré fringe image captured by the imaging system and further to determine an adjustment amount of a position of an objective lens according to the defocus direction and the defocus amount.

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