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公开(公告)号:US20230339060A1
公开(公告)日:2023-10-26
申请号:US18006812
申请日:2021-07-21
Applicant: SHIBAURA MACHINE CO., LTD.
Inventor: Takanobu AKIYAMA , Masahiko FUKUTA , Katsuji GAKUHARI
Abstract: In a processing machine 1, an X-axis control unit 33X, in each control cycle Tc, controls the position of an X-axis table 9X in the X-direction by feedback. The Z-axis control unit 33Z, in each control cycle Tc, acquires an up-close detection value of the position of the Z-axis table 9Z in the Z-direction, computes a second deviation based on a difference between the acquired detection value and a target position, and controls a Z-axis drive source 23z so that the second deviation is reduced. The Z-axis control unit 33Z, in each control cycle Tc, acquires an up-close detection value of a first error comprised of a deviation of the X-axis table 9 in the Z-direction, and increases or reduces the second deviation based on the detection value of the first error so that at least a portion of an error in a relative position of a workpiece 103 and a tool 101 in the Z-direction originating from the first error is cancelled by movement of the Z-axis table 9Z in the Z-direction.