公开(公告)号：US20130180019A1

公开(公告)日：2013-07-11

申请号：US13737022

申请日：2013-01-09

申请人： SII NANOTECHNOLOGY INC.

发明人： Masafumi WATANABE ,  Hiroumi MOMOTA

IPC分类号： G01Q70/10

CPC分类号： G01Q70/10 ,  G01Q40/00

摘要： Provided is a method of evaluating a probe tip shape in a scanning probe microscope, including: measuring the probe tip shape by a probe shape test sample having a needle-like structure; determining radii of cross-sections at a plurality of distances from the apex; and calculating, based on the distances and the radii, a radios of curvature when the probe tip shape is approximated by a circle.

摘要翻译： 提供了一种在扫描探针显微镜中评价探针尖端形状的方法，包括：通过具有针状结构的探针形状测试样品测量探针尖端形状; 确定距所述顶点多个距离处的横截面的半径; 并且当探针尖端形状由圆形近似时，基于距离和半径计算曲率半径。