公开(公告)号：US20200371344A1

公开(公告)日：2020-11-26

申请号：US16878540

申请日：2020-05-19

Applicant: SILICON LIGHT MACHINES CORPORATION

Inventor： Lars ENG ,  Alexander Payne ,  Daniel Eng ,  Satoshi Yamashita

IPC: G02B26/08 ,  G02B5/18 ,  G01J3/02 ,  G02B27/30

Abstract: A system and method are provided for spectral shaping of light from a broadband source using a linear spatial light modulator (SLM). The system includes an illumination source generating light including a plurality of wavelengths, a lens to collimate the light and an aperture to define its angular spread, a diffraction grating to disperse the beam by wavelength, and a focusing element to focus the dispersed beams from the diffraction grating onto a plurality of pixels of the SLM. The SLM is configured to individually modulate the dispersed beams by diffracting light output therefrom into higher orders, where a diffraction angle of output light is greater than an input cone angle of incoming light from the illumination source.

公开(公告)号：US20200247052A1

公开(公告)日：2020-08-06

申请号：US16780543

申请日：2020-02-03

Applicant: SILICON LIGHT MACHINES CORPORATION

Inventor： Alexander PAYNE ,  Lars ENG ,  James Hunter

IPC: B29C64/268 ,  G02B26/08 ,  G02B26/06 ,  B33Y10/00 ,  B33Y30/00 ,  B29C64/135 ,  B29C64/153 ,  B29C64/277

Abstract: A spatial light modulator (SLM) including a two-dimensional (2D) array of n rows of m pixels, and a stacked drive circuit including at least one, one-dimensional (1D) array of n*m drivers monolithically integrated on the same substrate and methods of fabricating and methods of using the same in materials processing applications are provided. Generally, each pixel includes at least one modulator, and is configured to modulate light incident thereon in response to drive signals received from the stacked drive circuit. The 1D array of the stacked drive circuit includes a single row of n*m drivers arranged adjacent to and laterally separated from the 2D array of pixels. Other embodiments are also described.