MEMS SENSOR FOR SENSING DEFORMATION BY BREAKING CONTACT BETWEEN TWO ELECTRODES

    公开(公告)号:US20220146247A1

    公开(公告)日:2022-05-12

    申请号:US17605692

    申请日:2020-05-07

    Applicant: SILMACH

    Abstract: The present invention relates to a MEMS deformation sensor for measuring a relative movement between two regions of a structure, the sensor comprising: —a first portion (2) and a second portion (3) that are movable with respect to one another along a direction of measurement (X); —a thrust element (4) mounted fixed with respect to the first portion; —a first electrode (A) and a second electrode (B) that are capable of being raised to different electrical potentials, each mounted fixed with respect to the second portion; —a connecting portion (I) forming an electrical link between the first electrode and the second electrode, the thrust element applying a load to the connecting portion when the first portion moves with respect to the second portion along the direction of measurement beyond a predetermined distance, the electrical link being broken under the effect of the load.

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