公开(公告)号：US20160064175A1

公开(公告)日：2016-03-03

申请号：US14784029

申请日：2014-08-29

Applicant: SINGRAY, INC

Inventor： Wenbing YUN ,  Janos KIRZ ,  Sylvia Jia Yun LEWIS

IPC: H01J35/12 ,  G03F7/16 ,  G03F7/36 ,  H01J35/10

CPC classification number: H01J35/12 ,  G03F7/16 ,  G03F7/36 ,  H01J35/105 ,  H01J2235/081 ,  H01J2235/1204

Abstract: Disclosed are targets for generating x-rays using electron beams and their method of fabrication. They comprise a number of microstructures fabricated from an x-ray target material arranged in close thermal contact with a substrate such that the heat is more efficiently drawn out of the x-ray target material. This allows irradiation of the x-ray generating substance with higher electron density or higher energy electrons, leading to greater x-ray brightness, without inducing damage or melting. The microstructures may comprise conventional x-ray target materials (such as tungsten) that are patterned at micron-scale dimensions on a thermally conducting substrate, such as diamond. The microstructures may have any number of geometric shapes to best generate x-rays of high brightness and efficiently disperse heat. In some embodiments, the target comprising microstructures may be incorporated into a rotating anode geometry, to enhance x-ray generation in such systems.

Abstract translation: 公开了使用电子束产生X射线的目标及其制造方法。 它们包括由x射线靶材料制成的多个微结构，该X射线靶材料与衬底紧密地热接触地布置，使得热量更有效地从x射线靶材料中拉出。 这允许以更高的电子密度或更高能量的电子照射x射线产生物质，导致更大的x射线亮度，而不引起损伤或熔化。 微结构可以包括在诸如金刚石的导热基底上以微米级尺寸图案化的常规x射线靶材料（例如钨）。 微结构可以具有任何数量的几何形状，以最好地产生高亮度的x射线并有效地分散热量。 在一些实施例中，包括微结构的靶可以并入到旋转阳极几何中，以增强这种系统中的x射线产生。