MANAGEMENT DEVICE, MANAGEMENT METHOD, MANAGEMENT PROGRAM, AND RECORDING MEDIUM

    公开(公告)号:US20220291169A1

    公开(公告)日:2022-09-15

    申请号:US17690305

    申请日:2022-03-09

    Abstract: A management device includes: an acquisition unit that acquires inspection result data indicating an inspection result of each of a plurality of workpieces and processing condition data indicating a processing condition used for processing each of the plurality of workpieces; an analysis unit that selects a specific parameter correlated with the inspection result among a plurality of processing parameters; and a prediction unit that predicts predict whether or not the processing device will become abnormal in future based on a temporal change in a value of the specific parameter.

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