Irradiation apparatus
    1.
    发明授权

    公开(公告)号:US11137594B2

    公开(公告)日:2021-10-05

    申请号:US16514410

    申请日:2019-07-17

    Abstract: There is provided an irradiation apparatus 1 including a laser light source 6, a light deflector 7, and a control unit 8. The light deflector 7 has a piezoelectric actuator 74 that include a plurality of piezoelectric cantilevers 79 in a meandering pattern arrangement. In the control unit 8, the driving voltage control unit 14 stops supplying a driving voltage to some piezoelectric cantilevers 79 when a designated drawing area designated by the drawing area designating unit 15 is an upper drawing area Fu and a lower drawing area Fd that are partial drawing areas.

    Light deflector
    2.
    发明授权

    公开(公告)号:US10558033B2

    公开(公告)日:2020-02-11

    申请号:US16278149

    申请日:2019-02-17

    Abstract: A light deflector 1 includes a reflector (2), inner piezoelectric actuators (4), an inner frame (5), outer piezoelectric actuators (6), and an outer frame (7). The reflector (2) is oscillated about a first axis Ua and a second axis Ub by the inner piezoelectric actuators (4) and the outer piezoelectric actuators (6), respectively. Formed on the rear surface of the light deflector 1 is a projecting rib (52), which projects from an encircling rib (51) of the inner frame (5) and reaches a corner portion (36) of a distal end portion of a piezoelectric cantilever (13a). A vertical side (22b) has an outer recess (35). The outer recess (35) extends along the projecting rib (52) in a portion of the distal end side of the piezoelectric cantilever (13a).

    IRRADIATION APPARATUS
    3.
    发明申请

    公开(公告)号:US20200026067A1

    公开(公告)日:2020-01-23

    申请号:US16514410

    申请日:2019-07-17

    Abstract: There is provided an irradiation apparatus 1 including a laser light source 6, a light deflector 7, and a control unit 8. The light deflector 7 has a piezoelectric actuator 74 that include a plurality of piezoelectric cantilevers 79 in a meandering pattern arrangement. In the control unit 8, the driving voltage control unit 14 stops supplying a driving voltage to some piezoelectric cantilevers 79 when a designated drawing area designated by the drawing area designating unit 15 is an upper drawing area Fu and a lower drawing area Fd that are partial drawing areas.

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