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公开(公告)号:US11211507B2
公开(公告)日:2021-12-28
申请号:US16097397
申请日:2017-04-26
申请人: STICHTING ENERGIEONDERZOEK CENTRUM NEDERLAND , NEDERLANDSE ORGANISATIE VOOR TOEGEPAST—NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人: Johan Bosman , Anne Ferenc Karel Victor Biezemans , Veronique Stephanie Gevaerts , Nicola Debernardi
IPC分类号: H01L31/0463 , H01L31/0749 , H01L31/0256 , H01L31/0392 , H01L31/0224
摘要: Disclosed is a method for making interconnected solar cells, including: a) providing a continuous layer stack on a substrate, including a top electrode layer, a bottom electrode layer adjacent to the substrate, a photovoltaic active layer and a barrier layer adjacent to the bottom electrode layer between the top and bottom electrode layers; b) selectively removing the top electrode layer and the photo-voltaic layer for obtaining a first trench exposing the barrier layer using a first laser beam with a first wavelength; c) selectively removing the barrier layer and the bottom electrode layer within the first trench for obtaining a second trench exposing the substrate using a second laser beam with a second wavelength, d) filling the first trench and the second trench with electrical insulating member. The first wavelength of the first laser beam is larger than a wavelength corresponding with a bandgap energy of the photo-voltaic layer.