公开(公告)号：US11139411B2

公开(公告)日：2021-10-05

申请号：US16386184

申请日：2019-04-16

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Massimo Cataldo Mazzillo ,  Giovanni Condorelli

IPC: H01L31/107 ,  H01L31/18 ,  G01N21/75 ,  H01L27/146

Abstract: A device for detecting a chemical species, including a Geiger-mode avalanche diode, which includes a body of semiconductor material delimited by a front surface. The semiconductor body includes: a cathode region having a first type of conductivity, which forms the front surface; and an anode region having a second type of conductivity, which extends in the cathode region starting from the front surface. The detection device further includes: a sensitive structure arranged on the anode region and including at least one sensitive region, which has an electrical permittivity that depends upon the concentration of the chemical species; and a resistive region, arranged on the sensitive structure and electrically coupled to the anode region.

公开(公告)号：US11670732B2

公开(公告)日：2023-06-06

申请号：US17464299

申请日：2021-09-01

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Massimo Cataldo Mazzillo ,  Giovanni Condorelli

IPC: H01L31/107 ,  H01L31/18 ,  G01N21/75 ,  H01L27/146

CPC classification number: H01L31/1075 ,  G01N21/75 ,  H01L27/14643 ,  H01L31/18

Abstract: A device for detecting a chemical species, including a Geiger-mode avalanche diode, which includes a body of semiconductor material delimited by a front surface. The semiconductor body includes: a cathode region having a first type of conductivity, which forms the front surface; and an anode region having a second type of conductivity, which extends in the cathode region starting from the front surface. The detection device further includes: a sensitive structure arranged on the anode region and including at least one sensitive region, which has an electrical permittivity that depends upon the concentration of the chemical species; and a resistive region, arranged on the sensitive structure and electrically coupled to the anode region.

公开(公告)号：US11171255B2

公开(公告)日：2021-11-09

申请号：US16386170

申请日：2019-04-16

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Massimo Cataldo Mazzillo ,  Giovanni Condorelli ,  Lucio Renna

IPC: H01L31/14 ,  H01L27/144 ,  H01L31/024 ,  H01L31/0352 ,  H01L31/107 ,  G01J1/44 ,  H01L31/18 ,  G01J1/42

Abstract: A device for detecting a chemical species including a Geiger mode avalanche photodiode, which comprises a body of semiconductor material delimited by a front surface. The semiconductor body includes: a cathode region having a first type of conductivity, which forms the front surface; and an anode region having a second type of conductivity, which extends within the cathode region starting from the front surface. The detection device further includes: a dielectric region, which extends on the front surface; and a sensitive region, which is arranged on top of the dielectric region and electrically coupled to the anode region and has a resistance that depends upon the concentration of the chemical species.