公开(公告)号：US20180292645A1

公开(公告)日：2018-10-11

申请号：US16007951

申请日：2018-06-13

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Guido CHIARETTI ,  Fabio Luigi GRILLI ,  Roberto CARMINATI ,  Bruno MURARI ,  Lorenzo SARCHI

IPC: G02B26/10 ,  H04N9/31 ,  G03B21/28

Abstract: A projective MEMS device, including: a fixed supporting structure made at least in part of semiconductor material; and a number of projective modules. Each projective module includes an optical source, fixed to the fixed supporting structure, and a microelectromechanical actuator, which includes a mobile structure and varies the position of the mobile structure with respect to the fixed supporting structure. Each projective module further includes an initial optical fiber, which is mechanically coupled to the mobile structure and optically couples to the optical source according to the position of the mobile structure.

公开(公告)号：US20140112617A1

公开(公告)日：2014-04-24

申请号：US14145807

申请日：2013-12-31

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alberto PAGANI ,  Alessando MOTTA ,  Sara LOI ,  Guido CHIARETTI

IPC: G02B6/12

CPC classification number: G02B6/12002 ,  G02B6/12004 ,  G02B6/42 ,  G02B6/4214 ,  G02B6/43 ,  H01L31/02327 ,  H01L31/103 ,  H01L31/125

Abstract: An integrated electronic device, delimited by a first surface and by a second surface and including: a body made of semiconductor material, formed inside which is at least one optoelectronic component chosen between a detector and an emitter; and an optical path which is at least in part of a guided type and extends between the first surface and the second surface, the optical path traversing the body. The optoelectronic component is optically coupled, through the optical path, to a first portion of free space and a second portion of free space, which are arranged, respectively, above and underneath the first and second surfaces.