-
1.发明授权MEMS device including a mobile element and a resistive sensor, and method for generating a signal indicating the position of the mobile element 有权包括移动元件和电阻传感器的MEMS装置以及用于产生指示移动元件的位置的信号的方法公开(公告)号：US09255782B2
公开(公告)日：2016-02-09
申请号：US13975565
申请日：2013-08-26
Applicant: STMicroelectronics S.r.l.
Inventor： Marco Defazio , Bruno Murari
CPC classification number: G01B7/14 , G01D5/24 , G01R27/2605 , G02B26/0841 , H04N9/3129
Abstract: A MEMS device includes a supporting body, a first deformable element and a second deformable element, and a mobile element set between the first and second deformable elements and rotatable with respect to the fixed supporting body. A generator causes a current to flow through at least one of the first and second deformable elements, which function as resistors, so as to generate an electrical position signal proportional to deformation of the first and second deformable elements and indicative of angular position of the mobile element. The electrical signal is processed to determine mobile element angular position. A drive signal is generated in response to the electrical signal for the purpose of driving oscillation of the mobile element.
Abstract translation: MEMS器件包括支撑体，第一可变形元件和第二可变形元件，以及设置在第一和第二可变形元件之间并可相对于固定支撑体旋转的移动元件。 发电机引起电流流过第一和第二可变形元件中的至少一个，其起到电阻的作用，以便产生与第一和第二可变形元件的变形成比例的电位置信号并且指示移动体的角位置 元件。 处理电信号以确定移动元件角位置。 响应于电信号而产生用于驱动移动元件的振荡的驱动信号。
-
2.发明申请MEMS DEVICE INCLUDING A MOBILE ELEMENT AND A RESISTIVE SENSOR, AND METHOD FOR GENERATING A SIGNAL INDICATING THE POSITION OF THE MOBILE ELEMENT 有权包括移动元件和电阻传感器的MEMS器件，以及用于产生指示移动元件的位置的信号的方法公开(公告)号：US20140062506A1
公开(公告)日：2014-03-06
申请号：US13975565
申请日：2013-08-26
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Marco Defazio , Bruno Murari
IPC: G01B7/14
CPC classification number: G01B7/14 , G01D5/24 , G01R27/2605 , G02B26/0841 , H04N9/3129
Abstract: A MEMS device includes a supporting body, a first deformable element and a second deformable element, and a mobile element set between the first and second deformable elements and rotatable with respect to the fixed supporting body. A generator causes a current to flow through at least one of the first and second deformable elements, which function as resistors, so as to generate an electrical position signal proportional to deformation of the first and second deformable elements and indicative of angular position of the mobile element. The electrical signal is processed to determine mobile element angular position. A drive signal is generated in response to the electrical signal for the purpose of driving oscillation of the mobile element.
Abstract translation: MEMS器件包括支撑体，第一可变形元件和第二可变形元件，以及设置在第一和第二可变形元件之间并可相对于固定支撑体旋转的移动元件。 发电机引起电流流过第一和第二可变形元件中的至少一个，其起到电阻的作用，以便产生与第一和第二可变形元件的变形成比例的电位置信号并且指示移动体的角位置 元件。 处理电信号以确定移动元件角位置。 响应于电信号而产生用于驱动移动元件的振荡的驱动信号。
-
Search Results
2
records
(took 0.013 seconds)
