公开(公告)号：US20230361151A1

公开(公告)日：2023-11-09

申请号：US18298781

申请日：2023-04-11

Applicant: STMicroelectronics (Crolles 2) SAS

Inventor： Jonathan Fantuz ,  Alain Inard ,  Didier Dutartre

IPC: H01L27/146

CPC classification number: H01L27/14685 ,  H01L27/14627

Abstract: In accordance with an embodiment, a method for manufacturing an optical device on a support substrate includes: forming first microlens structures on the support substrate using a first photolithography process such that the first microlens structures are separated from one another; deforming the first microlens structures so as to give the first microlens structures a curved shape, wherein the first microlens structures are separated from one another by spacer regions after deformation; forming second microlens structures substrate using a second photolithography process such that the second microlens structures extend over the first microlens structures; and deforming the second microlens structures such that the second microlens structures have a curved form matching the curved shape of the first microlens structures and extend partly into the spacer regions between the first microlens structures.