公开(公告)号：US20250076048A1

公开(公告)日：2025-03-06

申请号：US18240955

申请日：2023-08-31

Applicant: STMicroelectronics International N.V.

Inventor： Alessandro MAGNANI ,  Matteo QUARTIROLI ,  Alessandro MECCHIA

IPC: G01C19/5712 ,  G01C25/00

Abstract: A sensor module includes a pattern generator configured to generate a variable frequency self-test signal. The sensor module includes an inertial sensor including a self-test electrode configured to receive the frequency sweep self-test signal. The inertial sensor is configured to generate an analog sensor signal based on the self-test signal. The sensor module includes an analog to digital converter configured to generate a digital sensor signal based on the analog sensor signal and a demodulator including a first input configured to receive the digital sensor signal, a second input configured to receive the self-test signal, and an output configured to output a demodulated signal. The sensor module includes a first low pass filter coupled to the output of the demodulator and configured to generate a baseband signal. The sensor module includes a calibration circuit configured to identify different MEMS characteristics, like resonance frequency, Q-factor, or sensitivity based on the baseband signal.