-
公开(公告)号:US20250110263A1
公开(公告)日:2025-04-03
申请号:US18894603
申请日:2024-09-24
Applicant: STMicroelectronics International N.V.
Inventor: Simon GUILLAUMET , Stephanie AUDRAN , Benjamin VIANNE , James Peter Drummond DOWNING
Abstract: An optical device includes a metasurface formed by a metasurface substrate having at least a first metasurface layer made of a first material and an array of pillars extending through the first metasurface layer. The pillars are made of a second material different from the first material. The metasurface has a first face and a second face opposite the first face. A first anti-reflection stack is positioned over the first face of the metasurface. The first anti-reflection stack has a third face and a fourth face opposite the third face and positioned over the first face of the metasurface. A metal trace has a portion which is exposed at the third face of the first anti-reflection stack.