公开(公告)号：US10345577B2

公开(公告)日：2019-07-09

申请号：US15645259

申请日：2017-07-10

Applicant: STMicroelectronics Ltd

Inventor： Mark Kolodkin

IPC: G02B26/08

Abstract: A device described herein includes a movable MEMS mirror, with a driver configured to drive the movable MEMS mirror with a periodic signal such that the MEMS mirror oscillates at its resonance frequency. A feedback measuring circuit is configured to measure a signal flowing through the movable MEMS mirror. A processor is configured to sample the signal at first and second instants, generate an error signal as a function of a difference between the signal at the first instant in time and the signal at the second instant in time, and determine the opening angle of the movable MEMS mirror as a function of the error signal.

公开(公告)号：US20170307873A1

公开(公告)日：2017-10-26

申请号：US15645259

申请日：2017-07-10

Applicant: STMicroelectronics Ltd

Inventor： Mark Kolodkin

IPC: G02B26/08

CPC classification number: G02B26/0841 ,  G02B26/085

Abstract: A device described herein includes a movable MEMS mirror, with a driver configured to drive the movable MEMS mirror with a periodic signal such that the MEMS mirror oscillates at its resonance frequency. A feedback measuring circuit is configured to measure a signal flowing through the movable MEMS mirror. A processor is configured to sample the signal at first and second instants, generate an error signal as a function of a difference between the signal at the first instant in time and the signal at the second instant in time, and determine the opening angle of the movable MEMS mirror as a function of the error signal.