公开(公告)号：US11137592B2

公开(公告)日：2021-10-05

申请号：US16248379

申请日：2019-01-15

Applicant: STMicroelectronics S.r.l.

Inventor： Luca Lamagna ,  Stefano Losa ,  Silvia Rossini ,  Federico Vercesi ,  Elena Cianci ,  Graziella Tallarida ,  Claudia Wiemer

IPC: G02B26/08 ,  G02B1/18 ,  G02B1/14 ,  B81B1/00 ,  G02B5/08

Abstract: A micromechanical mirror structure includes a mirror element designed to reflect an incident light radiation and a protective structure arranged over the mirror element to provide mechanical protection for the mirror element and to increase the reflectivity of the mirror element with respect to the incident light radiation. The protective structure has a first protective layer and a second protective layer which are stacked on the mirror element. The second protective layer is arranged on the first protective layer and the first protective layer is arranged on the mirror element. The layers include a respective dielectric material and having respective refractive indexes that jointly increase the reflectivity of the mirror element in a range of wavelengths of interest.