公开(公告)号：US20220342205A1

公开(公告)日：2022-10-27

申请号：US17238596

申请日：2021-04-23

Applicant: STMicroelectronics S.r.l. ,  STMicroelectronics Ltd

Inventor： Davide TERZI ,  Gianluca MENDICINO ,  Dadi SHARON

IPC: G02B26/10 ,  H02N2/10 ,  H02N2/14 ,  G02B26/08

Abstract: Disclosed herein is a microelectromechanical (MEMS) device, including a rotor and a first piezoelectric actuator mechanically coupled to the rotor. The first piezoelectric actuator is electrically coupled between a first signal node and a common voltage node. A second piezoelectric actuator is mechanically coupled to the rotor, and is electrically coupled between a second signal node and the common voltage node. Control circuitry includes a drive circuit configured to drive the first and second piezoelectric actuators, a sense circuit configured to process sense signals generated by the first and second pizeoelectric actuators, and a multiplexing circuit. The multiplexing circuit is configured to alternate between connecting the drive circuit to the first piezoelectric actuator while connecting the sense circuit to the second piezoelectric actuator, and connecting the drive circuit to the second piezoelectric actuator while connecting the sense circuit to the first piezoelectric actuator.

公开(公告)号：US20210048737A1

公开(公告)日：2021-02-18

申请号：US16540557

申请日：2019-08-14

Applicant: STMicroelectronics LTD

Inventor： Eli YASER ,  Guy AMOR ,  Yotam NACHMIAS ,  Dadi SHARON ,  Sivan NAGOLA

IPC: G03B21/28 ,  G02B26/08 ,  G02B26/10 ,  G03B21/20

Abstract: A control circuit includes a first control circuit generating a first drive control signal from a pre-drive signal (that is a frequency at which an opening angle of the first and second mirrors is equal) for the first mirror. A second control circuit generates a second drive control signal from the pre-drive signal for the second mirror. First and second drivers generate first and second drive signals for the first and second mirrors from the first and second drive control signals. The first and second drive control signals are generated so that the first and second drive signals each have a same frequency as the pre-drive signal but are different in amplitude from one another to cause the first and second mirrors to move at a same frequency, with a same and substantially constant given opening angle as one another, and in phase with one another.