PROCESS CHAMBER AND LOAD-LOCK SPLIT FRAME CONSTRUCTION
    1.
    发明申请
    PROCESS CHAMBER AND LOAD-LOCK SPLIT FRAME CONSTRUCTION 审中-公开
    过程室和负载分离框架结构

    公开(公告)号:US20080289284A1

    公开(公告)日:2008-11-27

    申请号:US12040284

    申请日:2008-02-29

    IPC分类号: E04B1/19

    CPC分类号: F16M3/00

    摘要: The present invention generally relates to a split frame assembly for supporting a chamber in a processing system. In order to adequately fit into the body of an airplane for transport, the frame may be split into two pieces. Once split, each piece may individually be loaded onto the airplane. The upper piece may comprise all of the various components necessary to operate the chamber including gas panels, control panels, or other panels. The lower piece may support the upper piece.

    摘要翻译: 本发明一般涉及一种用于在处理系统中支撑室的分割框架组件。 为了充分适应飞机的运输体,框架可以分成两部分。 一旦拆分,每件可以单独装载到飞机上。 上部件可以包括操作室的所有各种部件,包括气体面板,控制面板或其他面板。 下部件可以支撑上部件。