公开(公告)号：US11703452B2

公开(公告)日：2023-07-18

申请号：US17055314

申请日：2019-05-15

申请人： SUMCO CORPORATION

发明人： Yasunobu Shimizu ,  Keiichi Takanashi ,  Takeshi Fujita ,  Eriko Kitahara ,  Masanori Fukui

IPC分类号： G01N21/59 ,  C30B15/10 ,  C30B29/06 ,  C30B35/00 ,  G01B11/24 ,  G01N21/49

CPC分类号： G01N21/59 ,  C30B15/10 ,  C30B29/06 ,  C30B35/002 ,  G01B11/24 ,  G01N21/49

摘要： A measurement method and a measurement apparatus are capable of measuring the transmittance of a quartz crucible accurately. A measurement method includes: emitting a parallel light from a light source disposed on a side of one wall surface of a quartz crucible toward a predetermined measurement point of the quartz crucible; measuring reception levels of light transmitted through the quartz crucible at a plurality of positions by disposing a detector at the plurality of positions on a circle centered around an exit point of the parallel light on the other wall surface of the quartz crucible; and calculating a transmittance of the quartz crucible at the predetermined measurement point based on a plurality of the reception levels of the transmitted light measured at the plurality of positions.

公开(公告)号：US11361462B2

公开(公告)日：2022-06-14

申请号：US16587235

申请日：2019-09-30

申请人： SUMCO CORPORATION

发明人： Yasunobu Shimizu ,  Keiichi Takanashi ,  Toshihiko Uchida

IPC分类号： G06T7/62 ,  G06T7/13 ,  C30B15/10 ,  C30B29/06 ,  G06T7/00 ,  G06T7/12

摘要： Provided is an evaluation method capable of easily evaluating the inner circumference of a quartz crucible in a short time. The method of evaluating an inner circumference of a quartz crucible includes: a first step of imaging the inner circumference of the quartz crucible, thereby obtaining an image of the inner circumference; a second step of performing image processing on the image to obtain an edge image in which boundaries between cristobalite and glass are defined; a third step of extracting closed regions; a fourth step of performing arithmetic calculations on coordinate information of the boundaries, thereby obtaining calculated values; a fifth step of determining whether the closed regions are the cristobalite or the glass based on the calculated values; and a sixth step of compositing images in which closed regions are determined to be the cristobalite are overlaid, thereby obtaining a full image.