公开(公告)号：US20090083953A1

公开(公告)日：2009-04-02

申请号：US12199456

申请日：2008-08-27

申请人： Sam H. KIM ,  Beom Soo PARK ,  William N. STERLING

发明人： Sam H. KIM ,  Beom Soo PARK ,  William N. STERLING

IPC分类号： A44B21/00

CPC分类号： C23C16/4409 ,  H01J37/32458 ,  Y10T24/44043

摘要： Embodiments described herein relate to a clamp mechanism for a backing plate disposed in a PECVD chamber, comprising an upper clamp portion fixed to an interior portion of a chamber lid, and a lower clamp portion in sliding contact with the upper clamp portion and the backing plate, wherein the lower clamp portion comprises at least one fastener disposed through the lower clamp portion and the chamber lid, the at least one fastener comprising an adjustment member, and wherein rotation of the adjustment member causes lateral movement and compression to the backing plate.

摘要翻译： 本文所述的实施例涉及一种用于设置在PECVD室中的背板的夹紧机构，包括固定到室盖的内部的上夹具部分和与上夹板部分和背板滑动接触的下夹具部分 其中所述下夹具部分包括穿过所述下夹具部分和所述腔室盖的至少一个紧固件，所述至少一个紧固件包括调节构件，并且其中所述调节构件的旋转导致横向运动并压缩到所述背板。