公开(公告)号：US20240255437A1

公开(公告)日：2024-08-01

申请号：US18389522

申请日：2023-11-14

Applicant: Samsung Display Co., LTD.

Inventor： AKIFUMI SANGU ,  SE-KWANG HAN ,  HYERAN KO ,  JAEMIN SON

IPC: G01N21/88 ,  G01N21/94

CPC classification number: G01N21/8806 ,  G01N21/94

Abstract: An inspection apparatus includes a light source which radiates a beam, a first lens disposed between the inspection object and the light source with a first opening defined therethrough in a first direction, a second lens disposed between the inspection object and the first lens with a second opening defined therethrough in the first direction to overlap the first opening, an inspection unit disposed to be spaced apart from the inspection object with the first lens interposed therebetween and including an incidence portion disposed to overlap the first opening and the second opening on a plane, and a driving unit which adjusts a distance between the first lens and the inspection object or a distance between the second lens and the inspection object.