公开(公告)号：US20240141474A1

公开(公告)日：2024-05-02

申请号：US18449103

申请日：2023-08-14

Applicant: Samsung Display Co., LTD.

Inventor： Jonghyun CHOI ,  Min-Gyu SEO ,  Jaewan SEOL ,  Intaek YOON

IPC: C23C14/24 ,  C23C14/50

CPC classification number: C23C14/243 ,  C23C14/50

Abstract: A deposition source includes a first crucible, a second crucible disposed inside the first crucible, a block disposed inside the first crucible, the block being disposed on at least a portion of the second crucible, and a cover covering a top surface of the first crucible, the cover being disposed on the block.