公开(公告)号：US20220336551A1

公开(公告)日：2022-10-20

申请号：US17538053

申请日：2021-11-30

Applicant: Samsung Display Co., Ltd.

Inventor： SOO-YOUNG JUNG ,  SUNGJUN KIM ,  CHUNGHYUK LEE ,  SUNG JAE JUNG

IPC: H01L27/32 ,  H01L51/52

Abstract: A display device includes a substrate; a first electrode disposed on the substrate; and a pixel defining layer disposed on the substrate and which exposes the first electrode and includes a first region having a first height and a second region connected to the first region and having a second height higher than the first height.

公开(公告)号：US20150136185A1

公开(公告)日：2015-05-21

申请号：US14453447

申请日：2014-08-06

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： JUNGWON JO ,  CHUNGHYUK LEE ,  Joon NAM ,  SEONG GU KANG ,  HAK KIM ,  SungKu BAEK ,  KYUNGJAE LEE

IPC: B08B3/02 ,  B08B13/00

CPC classification number: B08B3/022

Abstract: Provided is a substrate cleaning apparatus of cleaning a substrate. The substrate cleaning apparatus includes a cleaning chamber, a first cleaning nozzle, a cover member, an air flow generation unit, and an exhaust unit. The main cleaning chamber has a cleaning space in which the substrate is cleaned and includes a sidewall in which a first vent hole is defined. The first cleaning nozzle is disposed in the main cleaning chamber to spray a first cleaning solution. The cover member covers the main cleaning chamber and has one side in which a second vent hole is defined. The air flow generation unit supplies air into the cleaning space through the first vent hole. The exhaust unit is coupled to the one side of the cover member to suck and exhaust the air supplied into the cleaning space through the second vent hole.

Abstract translation: 提供一种清洗基板的基板清洗装置。 基板清洗装置具备清洗室，第一清洗喷嘴，盖部件，气流产生部以及排气部。 主清洁室具有清洁空间，其中基板被清洁并且包括其中限定有第一通气孔的侧壁。 第一清洁喷嘴设置在主清洁室中以喷射第一清洁溶液。 盖构件覆盖主清洁室，并且具有限定第二通气孔的一侧。 气流发生单元通过第一通气孔向清洁空间供给空气。 排气单元联接到盖构件的一侧以通过第二通气孔吸入和排出供应到清洁空间中的空气。