公开(公告)号：US20170186954A1

公开(公告)日：2017-06-29

申请号：US15390908

申请日：2016-12-27

Applicant: Samsung Display Co., Ltd.

Inventor： Youngsun CHO ,  Daeyong KIM ,  Jongbum KIM ,  Jongho YANG ,  Yoonchan OH

IPC: H01L51/00 ,  B05B15/04 ,  B05B9/01 ,  B05D1/00 ,  B05D1/32

CPC classification number: H01L51/0011 ,  B05B12/22 ,  B05B12/36 ,  B05D1/32 ,  B05D1/60 ,  C23C14/042 ,  H01L51/56

Abstract: An organic layer deposition assembly for depositing a deposition material on a substrate includes a deposition source configured to spray the deposition material, a deposition source nozzle arranged in one side of the deposition source and including deposition source nozzles arranged in a first direction, a patterning slit sheet arranged to face the deposition source nozzle and having patterning slits in a second direction that crosses the first direction, and a correction sheet arranged between the deposition source nozzle and the patterning slit sheet and configured to block at least a part of the deposition material sprayed from the deposition source.

公开(公告)号：US20140356552A1

公开(公告)日：2014-12-04

申请号：US14049306

申请日：2013-10-09

Applicant: Samsung Display Co., Ltd.

Inventor： Daeyong KIM ,  Sukbeom YOU

IPC: C23C16/50 ,  H05B3/02 ,  H05B3/03

CPC classification number: C23C14/26 ,  C23C14/12 ,  C23C14/562 ,  H01L51/001 ,  H01L51/56 ,  H05B3/26

Abstract: A joule-heating evaporation deposition apparatus which deposits a layer on a target substrate, the apparatus including: a base substrate facing the target substrate including a plurality of target areas defined thereon; a plurality of heating electrodes on the base substrate; and a deposition material on the plurality of heating electrodes and an entire surface of the base substrate. Plural heating electrodes among the plurality of heating electrodes respectively face each target area among the plurality of target areas.

Abstract translation: 一种在目标基板上沉积层的焦耳加热蒸发沉积装置，所述装置包括：面向目标基板的基底基板，包括限定在其上的多个目标区域; 基底基板上的多个加热电极; 以及在所述多个加热电极和所述基底基板的整个表面上的沉积材料。 多个加热电极中的多个加热电极分别面对多个目标区域中的每个目标区域。