Lamination apparatus with air pressure and method for non-contact lamination using lamination apparatus
    1.
    发明授权
    Lamination apparatus with air pressure and method for non-contact lamination using lamination apparatus 有权
    具有空气压力的层压装置和使用层压装置的非接触层压方法

    公开(公告)号:US09358762B2

    公开(公告)日:2016-06-07

    申请号:US13792559

    申请日:2013-03-11

    CPC classification number: B32B37/10 B32B37/12 B32B2037/1072

    Abstract: A lamination apparatus, including: a substrate support; an adhesive film support that is disposed so as to be spaced from the substrate support; an air injection head that is disposed on a co-plane with the adhesive film support so as to be spaced apart from the substrate support or disposed so as to be further spaced apart from the substrate support than the adhesive film support; an air pump that supplies air to the air injection head; an air supply pipe that connects the air injection head with the air pump, wherein the air injection head includes an ion generation unit.

    Abstract translation: 一种层压装置,包括:基板支撑件; 设置成与衬底支撑件间隔开的粘合膜支撑件; 空气喷射头,其与所述粘合膜支撑件设置在与所述基底支撑件间隔开的配合平面上,或者设置成与所述粘合膜支撑件相比基板支撑件进一步间隔开; 空气泵,其向空气喷射头供应空气; 将空气喷射头与空气泵连接的供气管,其中,所述空气喷射头包括离子产生单元。

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