公开(公告)号：US20210226181A1

公开(公告)日：2021-07-22

申请号：US17110138

申请日：2020-12-02

申请人： Samsung Display Co., Ltd.

发明人： Dongkyun SEO ,  Hyoungsik KIM ,  Heekyun SHIN ,  Junho SIM

IPC分类号： H01L51/56 ,  H01L51/00

摘要： In a method of manufacturing a display apparatus, the method includes: preparing a support substrate; forming a metal oxide layer on a surface of the support substrate, the metal oxide layer comprising first charges; forming a debonding layer on a surface of the metal oxide layer, the debonding layer comprising second charges opposite to the first charges; forming a flexible substrate on a surface of the debonding layer; forming a display element and a thin film encapsulation layer on a surface of the flexible substrate, the display element comprising a thin film transistor and an organic light-emitting diode; and isolating the flexible substrate from the support substrate.