公开(公告)号：US20150083045A1

公开(公告)日：2015-03-26

申请号：US14276874

申请日：2014-05-13

Applicant: Samsung Display Co., Ltd.

Inventor： Sukbeom YOU ,  Hyungmin Kim

IPC: H01L51/56

CPC classification number: H01L51/0011 ,  C23C14/042 ,  H01L21/682

Abstract: A mask fixing device is disclosed. In one aspect, the mask fixing device includes a plate and a magnetic assembly. The magnetic assembly faces a mask such that a substrate is interposed therebetween and generates a magnetic force to fix the mask to the substrate. The plate holds the magnetic assembly and faces the substrate. The magnetic assembly includes a plurality of first and second magnetic members respectively having first and second magnetic poles. The first magnetic members and the second magnetic members are alternately arranged.

Abstract translation: 公开了一种掩模固定装置。 一方面，面罩固定装置包括板和磁性组件。 磁性组件面对掩模，使得衬底介于其间并产生磁力以将掩模固定到衬底。 该板保持磁性组件并面向衬底。 磁性组件包括分别具有第一和第二磁极的多个第一和第二磁性部件。 第一磁性构件和第二磁性构件交替布置。