公开(公告)号：US20220178016A1

公开(公告)日：2022-06-09

申请号：US17478083

申请日：2021-09-17

Applicant: Samsung Display Co., Ltd.

Inventor： JI-HEE SON ,  YOUNGMIN MOON ,  JAEUOON KIM ,  SEUNGYONG SONG ,  SUNGSOON IM ,  JONG-HYUN CHOUNG ,  HYUNMIN CHO

IPC: C23C16/04 ,  C23C16/06 ,  H01L51/56

Abstract: A deposition apparatus includes a chamber, a deposition source disposed in the chamber, a mask assembly, and a base substrate disposed on the mask assembly. The mask assembly includes a frame including frame openings, a mask disposed on the frame and including deposition holes, and a welding stick disposed on the mask. A welding groove is disposed along an edge of the frame and has a depth in the thickness direction of the frame. The welding stick overlaps the welding groove.