公开(公告)号：US20210343566A1

公开(公告)日：2021-11-04

申请号：US17154861

申请日：2021-01-21

Applicant: Samsung Display Co., Ltd.

Inventor： Jae Won SHIM ,  Yoon Jae LEE ,  Sung Lae KIM ,  Kang Won LEE ,  Kyung Hoon CHUNG

IPC: H01L21/683 ,  H01L21/687 ,  H01L51/00 ,  C23C14/50 ,  C23C14/24

Abstract: An apparatus for manufacturing a display device includes: a first housing having a first chamber; a support member disposed in the first chamber and including a frame having a plurality of openings; a plurality of adhesive patterns disposed on the frame; and a plurality of electrostatic supports overlapping the plurality of openings and supported for reciprocal movement in respective ones of the openings.