公开(公告)号：US20230215748A1

公开(公告)日：2023-07-06

申请号：US18081025

申请日：2022-12-14

Applicant: Samsung Display Co., Ltd.

Inventor： KANG-HYUK LEE ,  EUN SU JUN

IPC: H01L21/673 ,  H01L21/683

CPC classification number: H01L21/6734 ,  H01L21/6838

Abstract: A dummy panel transport apparatus includes: an adsorption unit including an injection hole into which compressed air is injected, a discharge hole to which the compressed air is discharged, and a suction hole in which an external air is sucked; an adsorption unit holder supporting the adsorption unit, and movable in a first direction and a direction opposite to the first direction; a plate disposed under the adsorption unit holder; a plate holder supporting the plate, and movable in a second direction crossing the first direction and in a direction opposite to the second direction; a dummy storage part disposed under the plate; a brush unit disposed on the plate; and a brush unit holder supporting the brush unit, and movable in the first direction, in the direction opposite to the first direction, in the second direction, and the direction opposite to the second direction.